Apparatus for fabricating semiconductor devices
AssigneeSamsung Electronics Co., Ltd.
InventorsIl-Young Han, Jae-Sung Kwon, Sang-Wook Park, Won-Keun Kim
Life of this patent
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Abstract
An apparatus for fabricating semiconductor devices includes a chamber having a bottom plane, a side wall and a lid. An irradiating unit is at an interior of the chamber. A substrate mounting unit is between the bottom plane of the chamber and the irradiating unit. The irradiating unit includes an irradiating tube and a hole penetrating the central region of the irradiating tube. The irradiating tube has a hollow disk shape, and a lower surface of the irradiating tube is opened to the substrate mounting unit.
Claims20
An apparatus for fabricating semiconductor devices comprising:
- a chamber having a bottom plane, a side wall and a lid;
- an irradiating unit at an interior of the chamber;
- and
- a substrate mounting unit between the bottom plane of the chamber, and the irradiating unit,
- wherein the irradiating unit comprises an irradiating tube and a hole penetrating a central region of the irradiating tube, the irradiating tube has a hollow disk shape, and a lower surface of the irradiating tube is open to the substrate mounting unit.
An apparatus for fabricating semiconductor devices comprising:
- a chamber comprising a bottom plane and a lid shaped as an asymmetric polygon, and a side wall having a same number of surfaces as sides of the polygon;
- an irradiating unit at a central region of an interior of the chamber;
- a process chuck between the bottom plane of the chamber, and the irradiating unit,
- wherein the irradiating unit comprises a hollow ring on the process chuck, one end of the irradiating unit is closed, and the other end of the irradiating unit is fixed to the side wall of the chamber.
An apparatus for fabricating semiconductor devices comprising:
- a partially enclosed chamber;
- an irradiating unit at an interior of the chamber having a hollow disk shape;
- a substrate mounting unit between a bottom of the chamber, and the irradiating unit;
- and
- a rotation unit, a portion of the rotation unit being between the substrate mounting unit and the bottom of the chamber,
- wherein the rotation unit revolves and rotates the substrate mounting unit.
Dependencies are inferred from the claim text.