MEMS electrostatic actuator
AssigneeTexas Instruments Incorporated
InventorsArun K. Gupta, William C. McDonald
Life of this patent
Estimating the term…
Abstract
A MEMS electrostatic actuator includes a bottom plate affixed to a substrate and a top plate suspended above the bottom plate. The top plate has a parallel plate center section and two rotating members electrically connected to the center section. Each rotating member is attached centrally of the rotating member for rotation about an axis of rotation to a set of anchor posts. The attachment includes at least one pair of torsional springs attached along each axis, each spring comprising a rectangular metal square that twists as the rotational members rotate. Electrostatic pull-down electrodes are underneath each rotational member.
Claims9
A MEMS electrostatic actuator, comprising:
- a bottom plate affixed to a substrate;
- a top plate suspended above the bottom plate;
- the top plate comprising a parallel plate center section and two rotating members electrically connected to the center section;
- each rotating member is attached centrally of the rotating member for rotation about an axis of rotation to a set of anchor posts;
- the attachment including at least one pair of torsional springs attached along each axis, each spring comprising a rectangular metal square that twists as the rotational members rotate;
- and
- electrostatic pull-down electrodes underneath each rotational member.
A MEMS electrostatic actuator, comprising:
- a bottom plate affixed to a substrate;
- a top plate above the bottom plate, the top plate comprising a parallel plate center section and two rotating members electrically connected to the center section;
- each rotating member is attached centrally of the rotating member for rotation about an axis of rotation to a set of anchor posts;
- the attachment including at least one pair of springs attached along each axis, each spring comprising a rectangular metal square that twists as the rotational members rotate;
- the rotating members including spring tips at inner ends;
- the parallel plate center section having notches at edges adjacent the rotating members;
- and
- electrostatic pull-down electrodes underneath each rotational member.
Dependencies are inferred from the claim text.