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US 9,040,659 B2Granted
Methods and materials for removing metals in block copolymers
AssigneeAz Electronic Materials (Luxembourg) S.A.R.L.
InventorsJian Yin, Hengpeng Wu, Muthiah Thiyagarajan, SungEun Hong, Mark Neisser, Yi Cao
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Abstract
The present invention relates to a method for treating a block copolymer solution, wherein the method comprises: providing a solution comprising a block copolymer in a non aqueous solvent; and, treating the solution to remove metals using an ion exchange resin. The invention also relates to a method of forming patterns using the treated block copolymer.
Claims14
A method of forming a directed self assembly pattern comprising the steps of;
- a. coating a substrate with a solution with reduced metal ion contamination content, wherein the solution comprises a block copolymer where the block copolymer is derived from monomers which are arranged in blocks which are different compositionally, structurally or both and are capable of phase separating and forming domains, and further wherein the blocks have differing etch properties which can be used to remove one block while keeping the other block intact on the surface of the substrate, thus providing a pattern on the surface of the substrate and further where the solution with reduced metal ion contamination is produced by,
- i. treating the solution with a basic ion exchange to form a slurry;
- and,
- ii. filtering the slurry to remove the ion exchange resin;
- b. heating the substrate to form a directed self assembly polymer layer;
- and
- c. removing one block of the block copolymer and thereby forming a pattern.
4 more elements
Dependencies are inferred from the claim text.