Method and system for a semiconductor device package with a die to interposer wafer first bond
AssigneeAmkor Technology, Inc.
InventorsMichael G. Kelly, Ronald Patrick Huemoeller, Won Chul Do, David Jon Hiner
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AssigneeAmkor Technology, Inc.
InventorsMichael G. Kelly, Ronald Patrick Huemoeller, Won Chul Do, David Jon Hiner
Estimating the term…
Methods and systems for a semiconductor device package with a die to interposer wafer first bond are disclosed and may include bonding a plurality of semiconductor die comprising electronic devices to an interposer wafer, and applying an underfill material between the die and the interposer wafer. A mold material may be applied to encapsulate the die. The interposer wafer may be thinned to expose through-silicon-vias (TSVs) and metal contacts may be applied to the exposed TSVs. The interposer wafer may be singulated to generate assemblies comprising the semiconductor die and an interposer die. The die may be placed on the interposer wafer utilizing an adhesive film. The interposer wafer may be singulated utilizing one or more of: a laser cutting process, reactive ion etching, a sawing technique, and a plasma etching process. The die may be bonded to the interposer wafer utilizing a mass reflow or a thermal compression process.
A method for semiconductor packaging, the method comprising:
A method for semiconductor packaging, the method comprising:
A method for semiconductor packaging, the method comprising:
Dependencies are inferred from the claim text.