Laser ablation technique for electrical contact to buried electrically conducting layers in diamond
AssigneeThe United States of America as represented by the Secretary of the Navy
InventorsBradford B. Pate, Matthew P. Ray, Jeffrey W. Baldwin
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Abstract
A method of laser ablation for electrical contact to a buried electrically conducting layer in diamond comprising polishing a single crystal diamond substrate having a first carbon surface, implanting the diamond with a beam of 180 KeV followed by 150 KeV C+ ions at fluencies of 4×1015 ions/cm2 and 5×1015 ions/cm2 respectively, forming an electrically conducting carbon layer beneath the first carbon surface, and ablating the single crystal diamond which lies between the electrically conducting layer and the first carbon surface.
Claims9
A method of laser ablation for electrical contact to a buried electrically conducting layer in diamond comprising:
- polishing a single crystal diamond substrate having a first carbon surface;
- implanting the diamond with a beam of 180 KeV followed by 150 KeV C+ ions at fluencies of 4×1015 ions/cm2 and 5×1015 ions/cm2 respectively;
- forming an electrically conducting carbon layer beneath the first carbon surface;
- and
- ablating the single crystal diamond which lies between the electrically conducting layer and the first carbon surface.
A method of laser ablation for electrical contact to a buried electrically conducting layer in diamond comprising:
- polishing a single crystal diamond substrate having a first carbon surface;
- implanting the diamond with a beam of 180 KeV followed by 150 KeV C+ ions at fluencies of 4×1015 ions/cm2 and 5×1015 ions/cm2 respectively;
- forming an electrically conducting carbon layer beneath the first carbon surface;
- utilizing a diode pumped tripled Nd:YAG laser at 355 nm wherein the laser pulse duration is about 35 ns with a pulse frequency of 10 kHz;
- focusing the Nd:YAG laser about 0.5 mm above the first carbon surface;
- preventing damage at the first carbon surface;
- and
- ablating the single crystal diamond which lies between the electrically conducting layer and the first carbon surface.
Dependencies are inferred from the claim text.