Side vented pressure sensor device
AssigneeFreescale Semiconductor, Inc.
InventorsLow Boon Yew, Chee Seng Foong, Teck Beng Lau
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AssigneeFreescale Semiconductor, Inc.
InventorsLow Boon Yew, Chee Seng Foong, Teck Beng Lau
Estimating the term…
A semiconductor sensor device has a pressure sensing die and at least one other die mounted on a substrate, and electrical interconnections that interconnect the pressure sensing die and the at least one other die. An active region of the pressure sensing die is covered with a pressure sensitive gel material, and a cap having a cavity is mounted over the pressure sensing die such that the pressure sensing die is positioned within the cavity. The cap has a side vent hole that exposes the gel covered active region of the pressure sensing die to ambient atmospheric pressure outside the sensor device. Molding compound on an upper surface of the substrate encapsulates the at least one other die and at least a portion of the cap.
A method of assembling a semiconductor sensor device, the method comprising:
A semiconductor sensor device comprising:
Dependencies are inferred from the claim text.