Method for fabricating power-generating module with solar cell

A method for fabricating a power-generating module with solar cell, comprising the following steps of:

• providing a flexible substrate;
• forming a solar cell unit on the flexible substrate by using a high density plasma at a temperature lower than about 150° C.;
• and
• forming a thin film transistor on the flexible substrate;
• wherein the solar cell unit is coupled to the thin film transistor, so as to provide the power needed for the operation of the thin film transistor, and
• wherein forming the solar cell unit further comprises the following steps of:
• forming a first oxide layer on a metallic layer;
• forming a p-i-n multi-layer structure on the first oxide layer by using the high density plasma at a temperature lower than 150° C.;
• and
• forming a second oxide layer on the p-i-n multi-layer structure.

A method for fabricating a power-generating module with solar cell, comprising the following steps of:

• providing a flexible substrate;
• forming a silicon film solar cell on the flexible substrate by using a high density plasma at a temperature lower than about 150° C.;
• and
• forming a circuit unit on the flexible substrate;
• wherein the silicon film solar cell is coupled to the circuit unit, so as to provide the power needed for the operation of the circuit unit, and
• wherein forming the silicon thin solar cell further comprises the following steps of:
• forming a first oxide layer on a metallic layer;
• forming a p-i-n multi-layer structure on the first oxide layer by using the high density plasma at a temperature lower than 150° C.;
• and
• forming a second oxide layer on the p-i-n multi-layer structure.