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US 9,040,144 B2Granted
Filtering film structure
AssigneeNational Tsing Hua University
InventorsFan-Gang Tseng, Yu-Lun Chueh, Chia-Jung Chang, Wen-Chih Chang, Yu-Sheng Huang
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Abstract
A filtering film structure includes a film, a conductive layer and a dielectric layer. The film includes a plurality of holes. The conductive layer is disposed on the inner surface of the holes, and the dielectric layer is disposed on the conductive layer. When applying a voltage to the conductive layer, an electrical charge layer forms on the surface of the dielectric layer.
Claims11
A filtering film structure, comprising:
- a film comprising a plurality of holes;
- a conductive layer disposed on an inner surface of the holes;
- and
- a dielectric layer disposed on the conductive layer;
- an electrical charge layer formed on the surface of the dielectric layer when a voltage is applied to the conductive layer.
2 more elements
Dependencies are inferred from the claim text.