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US 9,040,141 B2Granted
Method for texturing DLC coatings, and textured DLC coatings thus obtained
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsCaroline Chouquet, Cédric Ducros, Jérôme Gavillet, Frédéric Sanchette
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Abstract
This method for texturing a DLC coating comprises depositing a single layer of balls or spheres on the free surface of the DLC coating; dry-etching the DLC coating using oxygen plasma; and lastly, cleaning the surface of said coating by eliminating the balls or spheres.
Claims6
A machine wear or friction part having a DLC surface coating textured by a method comprising:
- depositing a single layer of balls or spheres on the free surface of the DLC coating,
- controlled etching of the balls or spheres, by selective chemistry,
- dry-etching the DLC coating using oxygen plasma,
- and lastly, cleaning said coating by removing the balls or spheres;
- said DLC coating having cavities subsequent to texturing, whereof the volume V is given by the following relation:
- V
- =
- (
- 3
- -
- π
- 2
- )
-
- r
- 2
-
- d
- an expression wherein:
- r denotes the radius of a ball or sphere, and d is the depth of the cavity;
- adding a lubricant within said cavities;
- wherein a controlled etching of the balls or spheres is carried out using a SF6+CHF3 plasma;
- and
- wherein the diameter of the balls or spheres is between 100 nanometers and 10 micrometers.
21 more elements
Dependencies are inferred from the claim text.