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US 9,039,985 B2Granted
Ozone generator
AssigneeMKS Instruments, Inc.
InventorsDavid Kingston Owens, Paul Michael Meneghini
Life of this patent
Estimating the term…
Abstract
Ozone generator cells that include two thermally conductive plates that maintain contact between various layers of the cells in the absence of a bonding agent. The cells lack aluminum-containing materials in the discharge region of the cell.
Claims25
An ozone generator comprising:
- an ozone generator cell comprising:
- a high voltage electrode layer having a first side and a second side opposing the first side,
- a first dielectric layer having a first side and a second side opposing the first side, and a second dielectric layer having a first side and a second side opposing the first side, the second side of the first dielectric layer disposed on the first side of the high voltage electrode layer and the first side of the second dielectric layer disposed on the second side of the high voltage electrode layer,
- a first low voltage electrode layer having a first side and a second side opposing the first side, and a second low voltage electrode layer having a first side and a second side opposing the first side, the second side of the first low voltage electrode layer disposed over the first side of the first dielectric layer and the first side of the second low voltage electrode layer disposed over the second side of the second dielectric layer,
- two discharge regions, a first discharge region, of the two discharge regions, defined, in part, by the high voltage electrode layer, the first dielectric layer disposed on the first side of the high voltage electrode layer, and the second side of the first low voltage electrode layer disposed on the first side of the first dielectric layer, a second discharge region, of the two discharge regions, defined, in part, by the high voltage electrode layer, the second dielectric layer disposed on the second side of the high voltage electrode layer, and the first side of the second low voltage electrode layer disposed on the second side of the second dielectric layer, and
- a first thermally conductive plate having a first side and a second side opposing the first side, and a second thermally conductive plate having a first side and a second side opposing the first side, the second side of the first thermally conductive plate disposed over the first side of the first low voltage electrode layer and the first side of the second thermally conductive plate disposed over the second side of the second low voltage electrode layer, wherein the two thermally conductive plates maintain contact between the first low voltage electrode layer, the first dielectric layer, the high voltage electrode layer, the second dielectric layer, and the second low voltage electrode layer located therebetween in the absence of a bonding agent;
- a base plate over which the ozone generator cell is positioned;
- and
- a spring-loaded clamp plate coupled to the base plate such that the ozone generator cell is disposed between the base plate and the spring-loaded clamp plate, such that the coupled base plate and spring-loaded clamp plate apply pressure to the ozone generator cell to hold the layers of the ozone generator cell together,
- wherein the two dielectric layers, the two low voltage electrode layers, and the high voltage electrode layer are all fabricated using non-aluminum containing materials.
7 more elements
A method for fabricating an ozone generator cell, the method comprising:
- locating a second side of a first dielectric layer on a first side of a high voltage electrode layer;
- locating a first side of a second dielectric layer on a second, opposite side of the high voltage electrode layer;
- locating a second side of a first low voltage electrode layer over a first side of the first dielectric layer to define a first discharge region by combination of the high voltage electrode layer, the first dielectric layer and the first low voltage electrode layer;
- locating a first side of a second low voltage electrode layer over a second side of the second dielectric layer to define a second discharge region by combination of the high voltage electrode layer, the second dielectric layer and the second low voltage electrode layer;
- locating a first thermally conductive plate over a first side of the first low voltage electrode layer;
- locating a second thermally conductive plate over the second side of the second low voltage electrode layer;
- locating a base plate over the second thermally conductive plate;
- locating a spring-loaded clamp plate over the first thermally conductive plate;
- and
- coupling the spring-loaded clamp plate to the base plate, the coupled spring-loaded clamp plate and base plate applying pressure to the first low voltage electrode layer, the first dielectric layer, the high voltage electrode layer, the second dielectric layer, and the second low voltage electrode layer located between the first and second thermally conductive plates to maintain contact between the layers located therebetween in the absence of a bonding agent.
7 more elements
An ozone generator comprising:
- an ozone generator cell comprising:
- a high voltage electrode layer having a first side and a second side opposing the first side,
- a first dielectric layer having a first side and a second side opposing the first side, and a second dielectric layer having a first side and a second side opposing the first side, the second side of the first dielectric layer disposed on the first side of the high voltage electrode layer and the first side of the second dielectric layer disposed on the second side of the high voltage electrode layer,
- a first low voltage electrode layer comprising tungsten and having a first side and a second side opposing the first side, and a second low voltage electrode layer comprising tungsten and having a first side and a second side opposing the first side, the second side of the first low voltage electrode layer disposed over the first side of the first dielectric layer and the first side of the second low voltage electrode layer disposed over the second side of the second dielectric layer,
- two discharge regions, a first discharge region, of the two discharge regions, defined, in part, by the high voltage electrode layer, the first dielectric layer disposed on the first side of the high voltage electrode layer, and the second side of the first low voltage electrode layer disposed on the first side of the first dielectric layer, a second discharge region, of the two discharge regions, defined, in part, by the high voltage electrode layer, the second dielectric layer disposed on the second side of the high voltage electrode layer, and the first side of the second low voltage electrode layer disposed on the second side of the second dielectric layer, and
- a first thermally conductive plate having a first side and a second side opposing the first side, and a second thermally conductive plate having a first side and a second side opposing the first side, the second side of the first thermally conductive plate disposed over the first side of the first low voltage electrode layer and the first side of the second thermally conductive plate disposed over the second side of the second low voltage electrode layer, wherein the two thermally conductive plates maintain contact between the first low voltage electrode layer, the first dielectric layer, the high voltage electrode layer, the second dielectric layer, and the second low voltage electrode layer located therebetween in the absence of a bonding agent;
- a base plate over which the ozone generator cell is positioned;
- and
- a spring-loaded clamp late coupled to the base plate such that the generator cell is disposed between the base plate and the spring-loaded clamp plate, such that the coupled base plate and spring-loaded clamp plate apply pressure to the ozone generator cell to maintain the contact between the first low voltage electrode layer, the first dielectric layer, the high voltage electrode layer, the second dielectric layer and the second low voltage electrode layer located therebetween in the absence of a bonding agent.
6 more elements
A high concentration ozone generator comprising:
- an ozone generator cell comprising:
- a high voltage electrode layer fabricated using non-aluminum containing materials having a first side and a second side opposing the first side,
- a first dielectric layer having a first side and a second side opposing the first side, and a second dielectric layer having a first side and a second side opposing the first side, the second side of the first dielectric layer disposed on the first side of the high voltage electrode layer and the first side of the second dielectric layer disposed on the second side of the high voltage electrode layer,
- a first low voltage electrode layer having a first side and a second side opposing the first side, and a second low voltage electrode layer having a first side and a second side opposing the first side, the second side of the first low voltage electrode layer disposed over the first side of the first dielectric layer and the first side of the second low voltage electrode layer disposed over the second side of the second dielectric layer,
- two discharge regions lacking aluminum containing materials, a first discharge region, of the two discharge regions, defined, in part, by the high voltage electrode layer, the first dielectric layer disposed on the first side of the high voltage electrode layer, and the second side of the first low voltage electrode layer disposed on the first side of the first dielectric layer, a second discharge region, of the two discharge regions, defined, in part, by the high voltage electrode layer, the second dielectric layer disposed on the second side of the high voltage electrode layer, and the first side of the second low voltage electrode layer disposed on the second side of the second dielectric layer, and
- a first thermally conductive plate having a first side and a second side opposing the first side, and a second thermally conductive plate having a first side and a second side opposing the first side, the second side of the first thermally conductive plate disposed over the first side of the first low voltage electrode layer and the first side of the second thermally conductive plate disposed over the second side of the second low voltage electrode layer, wherein the two thermally conductive plates maintain contact between the first low voltage electrode layer, the first dielectric layer, the high voltage electrode layer, the second dielectric layer, and the second low voltage electrode layer located therebetween in the absence of a bonding agent to reduce the shear stresses in the ozone generator cell;
- a base plate over which the ozone generator cell is positioned;
- and
- a spring-loaded clamp plate coupled to the base plate such that the ozone generator cell is disposed between the base plate and the spring-loaded clamp plate, such that the coupled base plate and spring-loaded clamp plate apply pressure to the ozone generator cell to maintain the contact between the first low voltage electrode layer, the first dielectric layer, the high voltage electrode layer, the second dielectric layer, and the second low voltage electrode layer located therebetween in the absence of a bonding agent to reduce the shear stresses in the ozone generator cell.
6 more elements
Dependencies are inferred from the claim text.