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US 9,039,976 B2Granted
MEMS sensors with closed nodal anchors for operation in an in-plane contour mode
AssigneeAnalog Devices, Inc.
InventorsAndrew Sparks, William D. Sawyer
Life of this patent
Estimating the term…
Abstract
A MEMS sensor includes at least one closed nodal anchor along a predetermined closed nodal path on at least one surface of a resonant mass. The resonant mass may be configured to resonate substantially in an in-plane contour mode. Drive and/or sense electrodes may be disposed within a cavity formed at least in part by the resonant mass, the closed nodal anchor, and a substrate.
Claims23
A MEMS sensor comprising:
- a substrate;
- a resonant mass configured to resonate in an in-plane contour mode;
- a first closed nodal anchor connecting the resonant mass to the substrate along a first predetermined closed nodal path on a first surface of the resonant mass;
- a second closed nodal anchor connecting the resonant mass to the substrate along a second predetermined closed nodal path on a second surface of the resonant mass opposite the first surface;
- and
- at least one transducer in communication with the first resonant mass for at least one of driving and sensing in-plane movement of the resonant mass, wherein at least a portion of the first surface of the resonant mass is configured for exposure to an external environment.
3 more elements
A MEMS sensor comprising:
- a substrate;
- a plurality of resonant masses, each resonant mass configured to resonate in an in-plane contour mode and including (a) a first closed nodal anchor connecting the resonant mass to the substrate along a first predetermined closed nodal path on a first surface of the resonant mass and (b) a second closed nodal anchor connecting the resonant mass to the substrate along a second predetermined closed nodal path on a second surface of the resonant mass opposite the first surface;
- and
- a plurality of transducers in communication with the resonant masses for at least one of driving and sensing in-plane movement of the resonant masses, wherein at least a portion of the first surface of each resonant mass is configured for exposure to an external environment.
1 more element
A method of fabricating a MEMS in-plane resonator comprising:
- forming a resonant mass supported by a substrate and configured to resonate substantially in an in-plane contour mode;
- forming a first closed nodal anchor connecting the resonant mass to the substrate along a first predetermined closed nodal path on a first surface of the resonant mass;
- forming a second closed nodal anchor connecting the resonant mass to the substrate along a second predetermined closed nodal path on a second surface of the resonant mass opposite the first surface;
- and
- forming at least one transducer in communication with the first resonant mass for at least one of driving and sensing in-plane movement of the resonant mass, wherein at least a portion of the first surface of the resonant mass is configured for exposure to an external environment.
2 more elements
Dependencies are inferred from the claim text.