US 9,039,906 B2 · Method for producing an antireflection coating

Abstract

A method for producing an antireflection coating on a substrate is specified. A first nanostructure in a first material is formed using by means of a first plasma etching process. The first material is the material of the substrate or the material of a layer made of a first organic material applied onto the substrate. A layer made of a second material is applied onto the first nanostructure, the second material is an organic material. A second nanostructure is formed in the layer made of the second material using a second plasma etching process. The second material has a higher etching rate than the first material when carrying out the second plasma etching process.

Claims15

Dependent claims

A method for producing an antireflection coating on a substrate, the method comprising:

forming a first nanostructure in a first material using a first plasma etching process, wherein the first material is a material of the substrate or a material of a layer made of a first organic material applied onto the substrate;
applying a layer made of a second material onto the first nanostructure, wherein the second material is an organic material;
and
forming a second nanostructure in the layer made of the second material using a second plasma etching process, wherein the second material has a higher etching rate than the first material when carrying out the second plasma etching process.

1 more element

Dependencies are inferred from the claim text.

Facts

Application

14/309,582Filed 19 Jun 2014

Priority

DE 10 2013 106 39219 Jun 2013

Published

US 2014/0374377 A125 Dec 2014

Granted

26 May 2015

Term ends

Not estimatedThe source records don’t support an estimate.

Classification11 codes

G02B 1/111
Anti-reflection coatings: using layers comprising organic materials
B29C 59/14
Surface shaping of articles, e.g. embossing; Apparatus therefor: by plasma treatment
B29D 11/00865
Producing optical elements, e.g. lenses or prisms: applying coatings; tinting; colouring
C08J 7/123
Chemical modification: treatment by wave energy or particle radiation

Method for producing an antireflection coating

Life of this patent

Method for producing an antireflection coating

Life of this patent

Abstract

Claims15