Substrate processing apparatus, substrate processing method, and computer readable storage medium storing substrate processing program

An apparatus for processing a substrate comprising:

• a substrate holding unit including a substrate holding body configured to hold a substrate;
• a processing liquid supply unit connected to a processing liquid supply source and configured to supply a processing liquid to the substrate;
• a camera configured to photograph a region where a peripheral edge portion of the substrate is present when the substrate is properly held by the substrate holding unit;
• a control unit configured to determine whether the substrate is properly held by the substrate holding unit by comparing an area of the substrate holding body in the image photographed by the camera with a reference area obtained in advance representing a normal holding state of the substrate in which the substrate is properly held by the substrate holding unit;
• and
• a spring configured to a biasing force against the substrate holding unit such that the substrate holding unit is in an open state to hold the substrate.

An apparatus for processing a substrate comprising:

• a substrate holding unit configured to hold a substrate;
• a processing liquid supply unit connected to a processing liquid supply source and configured to supply a processing liquid to the substrate;
• a camera configured to photograph a region where a peripheral edge portion of the substrate is present when the substrate is properly held by the substrate holding unit;
• a control unit configured to determine whether the substrate is properly held by the substrate holding unit by comparing a distance between the peripheral edge portion of the substrate and a cup installed around the substrate holding body in the image photographed by the camera with a distance obtained in advance representing a normal state of the substrate in which the substrate is properly held by the substrate holding unit;
• and
• a spring configured to apply a biasing force a against the substrate holding unit such that the substrate holding unit is in an open state to hold the substrate.

An apparatus for processing a substrate comprising:

• a substrate holding unit configured to hold a substrate;
• a processing liquid supply unit connected to a processing liquid supply source and configured to supply a processing liquid to the substrate;
• a camera configured to photograph a region where a peripheral edge portion of the substrate is present when the substrate is properly held by the substrate holding unit;
• a control unit configured to determine whether the substrate is properly held by the substrate holding unit by comparing an image of an actual holding state of the substrate photographed by the camera with a reference image prepared in advance representing a normal holding state of the substrate in which the substrate is properly held by the substrate holding unit;
• and
• a spring configured to apply a biasing force against the substrate holding unit such that the substrate holding unit is in an open state to hold the substrate.