Highly-reliable micro-electromechanical system temperature sensor

A micro-electromechanical system-type (MEMS) sensor arrangement for wirelessly measuring temperatures, comprising:

• a multimorph sensor;
• a sensor coil coupled to the multimorph sensor;
• and
• a readout coil configured to be magnetically coupled to the sensor coil to i) energize the sensor coil, and ii) provide a readout of a natural frequency of the multimorph sensor, the sensor coil and the readout coil.

A method of making a micro-electromechanical system-type (MEMS) sensor arrangement for wirelessly measuring temperatures, comprising:

• thermally growing an electrically insulating layer over an electrically conducting substrate;
• depositing an electrically conducting layer over the electrically insulating layer;
• patterning and etching away to generate a combination of an electrically conducting pad, an electrically insulating pad, a plurality of electrically conducting beams and a plurality of electrically insulating beams, the plurality of the electrically conducting beams terminating and being anchored by the electrically conducting pad, and the plurality of the electrically insulating beams terminating and being anchored by the electrically insulating pad;
• and etching a well area under the electrically conducting beams and the electrically insulating beams.