Calibration of a chemical dispense system

A method of dispensing a specified volume of a fluid into a destination vessel, the method comprising:

• determining a flow rate in a supply line corresponding to a target pressure;
• wherein determining the flow rate that corresponds to the target pressure comprises:
• retrieving calibration data on a plurality of calibration pressures and corresponding calibration flow rates for a dispense path coupled to the destination vessel;
• and
• wherein the calibration data is generated by a process comprising:
• pushing a plunger in a dispenser to dispense a fluid into the supply line;
• measuring a resulting calibration pressure in the supply line;
• computing a corresponding calibration flow rate from a volume of the fluid dispensed into the supply line and a time elapsed in dispensing the fluid;
• recording the resulting calibration pressure and the corresponding calibration flow rate;
• calculating the flow rate corresponding to the target pressure from the calibration data;
• calculating an amount of time required to dispense the specified volume of the fluid at the flow rate;
• and
• dispensing the fluid at the target pressure through the supply line to the destination vessel for the amount of time.