Silicone rubber material for soft lithography
AssigneeKoninklijke Philips N.V.
InventorMarcus Antonius Verschuuren
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Abstract
The present invention relates to a silicone rubber like material and a printing device including a stamp layer (100;201) comprising such a material. The material is suitable for use in soft lithography as it enables stable features having dimensions in the nanometer range to be obtained on a substrate, and also allows for the accommodation onto rough and non-flat substrate surfaces. The invention also relates to methods for manufacturing the silicone rubber like material and stamp layer (100;201) and use thereof in lithographic processes.
Claims7
A method for manufacturing a patterned stamp layer comprising a silicone rubber like material having a Young's modulus in the range of from 7 MPa to 80 MPa, said method comprising:
- providing a composition comprising at least one functional T branched and/or functional Q branched (poly)siloxane precursor,
- adding at least one functional linear polysiloxane to the composition,
- incubating the composition at a temperature below 100 degrees centigrade,
- arranging the pattern in the silicone rubber like material, wherein the arranging a pattern in the silicone rubber like material is effected by executing, on a master mold pattern, the incubating to effect a stamp layer comprising a pattern of features;
- and
- releasing and removing the stamp layer from the master mold.
Dependencies are inferred from the claim text.