Micromechanical component and manufacturing method for a micromechanical component

A sensor device, comprising:

• a micromechanical component, including:
• a substrate having at least one stator electrode which is fixedly mounted with respect to the substrate;
• a movable mass having at least one actuator electrode which is fixedly mounted with respect to the movable mass;
• and
• at least one spring via which the movable mass is connected to the substrate so that the movable mass is displaceable with respect to the substrate at least from a first position into a second position, wherein the movable mass is structured from the substrate with at least one separating trench;
• at least one outer stator electrode spanning at least one section of the at least one separating trench or the movable mass, wherein the at least one actuator electrode protrudes at least into a first space between the at least one outer stator electrode and the substrate;
• and
• at least one inner stator electrode protruding at least into a second space between the at least one actuator electrode and the substrate;
• and
• an evaluation device which is configured to ascertain a first variable concerning a first capacitance of a first capacitor formed from the at least one outer stator electrode and the at least one actuator electrode, to ascertain a second variable concerning a second capacitance of a second capacitor formed from the at least one inner stator electrode and the at least one actuator electrode, to determine information by taking into account the ascertained first variable and the ascertained second variable, and to output the determined information.

A manufacturing method for a micromechanical component, the method comprising:

• connecting a movable mass via at least one spring to a substrate so that the movable mass is displaceable with respect to the substrate at least from a first position into a second position;
• fixedly mounting at least one stator electrode with respect to the substrate;
• and
• fixedly mounting at least one actuator electrode with respect to the movable mass;
• structuring at least the movable mass from the substrate with the aid of at least one separating trench;
• arranging at least one outer stator electrode so that the at least one outer stator electrode spans at least one section of the separating trench or the movable mass,
• arranging the at least one actuator electrode so that the at least one actuator electrode protrudes at least into a first space between the at least one outer stator electrode and the substrate;
• and
• arranging at least one inner stator electrode so that the at least one inner stator electrode protrudes at least into a second space between the at least one actuator electrode and the substrate.

A manufacturing method for a sensor device, the method comprising:

• manufacturing a micromechanical component by performing the following:
• connecting a movable mass via at least one spring to a substrate so that the movable mass is displaceable with respect to the substrate at least from a first position into a second position;
• fixedly mounting at least one stator electrode with respect to the substrate;
• and
• fixedly mounting at least one actuator electrode with respect to the movable mass;
• structuring at least the movable mass from the substrate with the aid of at least one separating trench;
• arranging at least one outer stator electrode so that the at least one outer stator electrode spans at least one section of the separating trench or the movable mass;
• arranging the at least one actuator electrode so that the at least one actuator electrode protrudes at least into a first space between the at least one outer stator electrode and the substrate;
• and
• arranging at least one inner stator electrode so that the at least one inner stator electrode protrudes at least into a second space between the at least one actuator electrode and the substrate;
• and
• providing an evaluation device which is configured, during subsequent operation of the sensor device, to ascertain a first variable concerning a first capacitance of a first capacitor formed from the at least one outer stator electrode and the at least one actuator electrode, to ascertain a second variable concerning a second capacitance of a second capacitor formed from the at least one inner stator electrode and the at least one actuator electrode, and to determine and output information concerning at least one of an acceleration exerted on the movable mass, a pressure exerted on the movable mass, or a magnetic field in a region of a coil which is fixedly mounted with respect to the movable mass, taking the ascertained first variable and the ascertained second variable into account.