Angular velocity sensor

An angular velocity sensor, comprising:

• first and second mass bodies;
• a first frame provided at an outer side of the first and second mass bodies so as to be spaced apart from the first and second mass bodies;
• a first flexible part respectively connects the first and second mass bodies to the first frame;
• a second flexible part respectively connects the first and second mass bodies to the first frame;
• a second frame provided at an outer side of the first frame so as to be spaced apart from the first frame;
• a third flexible part connects the first and second frames to each other;
• and a fourth flexible part connects the first and second frames to each other;
• third and fourth mass bodies respectively disposed to be perpendicular to the first and second mass bodies;
• a third frame provided at an outer side of the third and fourth mass bodies so as to be spaced apart from the third and fourth mass bodies;
• a fifth flexible part respectively connects the third and fourth mass bodies to the third frame;
• a sixth flexible part respectively connects the third and fourth mass bodies to the third frame;
• a fourth frame provided at an outer side of the third frame so as to be spaced apart from the third frame;
• a seventh flexible part connects the third and fourth frames to each other;
• and
• an eighth flexible part connects the third and fourth frames to each other,
• wherein the first and second mass bodies are respectively disposed at both sides of the fourth flexible part,
• the first frame has a thickness thinner than that of the second frame, in a thickness direction thereof, the third and fourth mass bodies are respectively disposed at both sides of the eighth flexible part, the fourth frame is disposed at a side of the second frame, and the third frame has a thickness thinner than that of the fourth frame, in the thickness direction thereof.