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US 9,038,461 B2Granted
Gyro sensor and electronic device
AssigneeSeiko Epson Corporation
InventorKei Kanemoto
Life of this patent
Estimating the term…
Abstract
A gyro sensor according to the invention includes a first mass portion including a first detection portion, a second mass portion including a second detection portion, first drive portions vibrating the first mass portion in a direction of a first axis, and a force conversion portion fixed to an anchor portion. The first mass portion and the second mass portion are connected with the force conversion portion. The force conversion portion is displaced with the anchor portion as an axis, and vibrates the second mass portion in a direction of a second axis crossing the first axis in a plane view.
Claims9
A gyro sensor comprising:
- a first mass portion including a first detection portion;
- a second mass portion including a second detection portion;
- a first drive portion vibrating the first mass portion in a direction of a first axis;
- and
- a force conversion portion fixed to an anchor portion, wherein
- the first mass portion and the second mass portion are connected with the force conversion portion,
- the force conversion portion is displaced with the anchor portion as an axis, and vibrates the second mass portion in a direction of a second axis crossing the first axis in a plan view,
- the force conversion portion includes:
- a rotating body;
- an anchor beam connecting the anchor portion with the rotating body;
- a first connection beam connecting the rotating body with the first mass portion;
- and
- a second connection beam connecting the rotating body with the second mass portion, and
- the rotating body has rigidity higher than that of the anchor beam.
11 more elements
Dependencies are inferred from the claim text.