Porous glass preform production apparatus
AssigneeShin-Etsu Chemical Co., Ltd.
InventorMakoto Yoshida
Life of this patent
Estimating the term…
Loading patent…
AssigneeShin-Etsu Chemical Co., Ltd.
InventorMakoto Yoshida
Estimating the term…
A porous preform production apparatus having a reaction vessel which includes an upper deposition chamber having an air supply inlet and an exhaust outlet, a lower deposition chamber having an air supply inlet, and a top chamber disposed on top of the upper deposition chamber and adapted to lift and store a porous preform formed by deposition, characterized in that the floor of the upper deposition chamber is disposed at a height between the lower end of a straight body part and the deposition tip of the porous glass preform during deposition, and a connection opening which connects the upper deposition chamber with the lower deposition chamber, is provided on the floor of the upper deposition chamber, and that when the aperture diameter of the connection opening is designated as A and the diameter of the porous preform passing through the connection opening as B, the ratio B/A satisfies the expression 0.05≦B/A≦0.6.
A method of producing a porous glass preform using a porous glass preform production apparatus with a reaction vessel including an upper deposition chamber having a first air supply inlet in a first wall and an exhaust outlet in a second wall opposing the first wall, a lower deposition chamber having a second air supply inlet and connected to the upper deposition chamber by a connection opening on a floor of the upper deposition chamber, and a top chamber disposed on top of the upper deposition chamber and adapted to lift and store a porous glass preform formed by deposition, the method comprising:
Dependencies are inferred from the claim text.