Electron microscope
AssigneeBoard of Trustees of Michigan State University
InventorsChong-Yu Ruan, Martin Berz, Zhensheng Tao
Life of this patent
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Abstract
An electron microscope is provided. In another aspect, an electron microscope employs a radio frequency which acts upon electrons used to assist in imaging a specimen. Furthermore, another aspect provides an electron beam microscope with a time resolution of less than 1 picosecond with more than 105 electrons in a single shot or image group. Yet another aspect employs a super-cooled component in an electron microscope.
Claims45
An electron microscope comprising:
- an electron gun operably emitting electrons;
- a radio frequency cavity within which a radio frequency is operably emitted to act upon the electrons;
- a pulse shaper adapted to shape a laser pulse received within the radio frequency cavity;
- and
- an imager operably using the electrons to at least one of:
- (a) create a magnified specimen image, or (b) produce diffraction patterns, after the electrons pass through the radio frequency cavity.
An electron microscope comprising:
- a radio frequency, femtosecond electron gun assembly operably emitting electrons within a radio frequency wave;
- a bunching cavity located downstream of the electron gun assembly and having a radio frequency wave in the bunching cavity for assisting in creating a group of at least a 105 quantity of the electrons with a time resolution of less than 1 picosecond, with a pattern of the electrons being wider than longer when they leave the bunching cavity;
- and
- a lens assisting in focusing the electrons.
An electron microscope comprising:
- an electron gun operably emitting a series of electrons;
- a housing surrounding at least a portion of the electron gun, the housing being made from a super-conducting material;
- a super-cooler attached to the housing to operably cause an internal surface of the housing to have a temperature less than or equal to 10 Kelvin;
- and
- an imager operably using the electrons to create a specimen image.
An electron microscope comprising an electron gun and an imager, wherein a time resolution for at least 105 electrons emitted by the electron gun is less than 1 picosecond per image created by the imager.
A method of using an electron microscope, the method comprising:
- (a) receiving a shaped laser beam in an upstream radio frequency cavity;
- (b) super-cooling the upstream cavity to a temperature less than or equal to 10 Kelvin;
- (c) generating an electron beam in the upstream cavity;
- (d) bunching the electron beam in a downstream radio frequency cavity;
- and
- (e) using the electron beam to create a specimen image.
Dependencies are inferred from the claim text.