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US 9,006,852 B2Granted
Solid-state imaging device with a light shielding layer formed around a transfer gate
AssigneeSony Corporation
InventorShinichi Arakawa
Life of this patent
Estimating the term…
Abstract
Disclosed herein is a solid-state imaging element including: a transfer section configured to transfer charge generated simultaneously by a photoelectric conversion section in all pixels to a memory section and have a metal gate; and a light-shielding section formed by filling a metal into a groove portion formed by digging an interlayer insulating film around the transfer section.
Claims13
A solid-state imaging element comprising:
- a plurality of pixels, respective ones of the plurality of pixels including:
- a photoelectric conversion section;
- a transfer section configured to transfer charge generated by the photoelectric conversion section to a memory section and have a metal gate;
- an interlayer insulating film having a groove portion around the transfer section;
- a liner film disposed between the interlayer insulating film and the transfer section;
- and
- a light-shielding section disposed in the groove portion and having a substantially planar upper surface which is flush with a surface of the liner film,
- wherein respective transfer sections of the plurality of pixels are configured to simultaneously transfer charge generated by a respective photoelectric conversion section.
5 more elements
Electronic equipment comprising
- a solid-state imaging element including a plurality of pixels, respective ones of the plurality of pixels including:
- a photoelectric conversion section;
- a transfer section configured to transfer charge generated by the photoelectric conversion section to a memory section and have a metal gate;
- an interlayer insulating film having a groove portion around the transfer section;
- a liner film disposed between the interlayer insulating film and the transfer section;
- and
- a light-shielding section disposed in the groove portion and having a substantially planar upper surface which is flush with a surface of the liner film,
- wherein respective transfer sections of the plurality of pixels are configured to simultaneously transfer charge generated by a respective photoelectric conversion section.
5 more elements
A manufacturing method comprising:
- forming a plurality of pixels, respectively including,
- forming a photoelectric conversion section;
- forming a metal gate of a transfer section configured to transfer charge generated by the photoelectric conversion section to a memory section;
- forming a liner film on the transfer section;
- forming an interlayer insulating film having a groove portion around the transfer section;
- and
- forming a light-shielding section in the groove portion and having a substantially planar upper surface which is flush with a surface of the liner film,
- transferring charge generated by a respective photoelectric conversion section from respective transfer sections of the plurality of pixels simultaneously.
5 more elements
Dependencies are inferred from the claim text.