Imaging apparatus using talbot interference and adjusting method for imaging apparatus

An imaging apparatus comprising:

• a diffraction grating which diffracts electromagnetic waves from an electromagnetic wave source;
• a shield grating which shields a part of the electromagnetic waves diffracted by the diffraction grating;
• a detector which detects an intensity distribution of the electromagnetic waves through the shield grating;
• and
• an adjusting unit which adjusts the attitude of at least one of the diffraction grating and the shield grating on the basis of the detection result by the detector,
• wherein the adjusting unit:
• divides the intensity distribution detected by the detector into a plurality of regions,
• performs Fourier transform on the intensity distributions in the divided plurality of regions and thus calculates intensity information on spectra corresponding to carrier frequencies;
• and
• adjusts the attitude of at least one of the diffraction grating and the shield grating on the basis of distributions of the intensity information on the spectra corresponding to the carrier frequencies.

An imaging apparatus comprising:

• a diffraction grating which diffracts electromagnetic waves from an electromagnetic wave source;
• a shield grating which shields a part of the electromagnetic waves diffracted by the diffraction grating;
• a detector which detects an intensity distribution of the electromagnetic waves through the shield grating;
• and
• an adjusting unit which adjusts the attitude of at least one of the diffraction grating and the shield grating on the basis of the detection result by the detector,
• wherein the adjusting unit:
• divides the intensity distribution detected by the detector into a plurality of regions;
• and
• adjusts the attitude of at least one of the diffraction grating and the shield grating on the basis of the intensity distributions of the plurality of regions, and
• wherein the adjusting unit adjusts the attitude of at least one of the diffraction grating and the shield grating such that the standard deviation of the intensity information on the spectrum corresponding to a carrier frequency or visibility value may be small.

An adjusting method used in an imaging apparatus having a diffraction grating which diffracts electromagnetic waves from an electromagnetic wave source;

• a shield grating which shields a part of the electromagnetic waves diffracted by the diffraction grating;
• and a detector which detects an intensity distribution of the electromagnetic waves through the shield grating, the method comprising the steps of:
• obtaining information on the intensity distribution detected by the detector;
• dividing the information on the intensity distribution into a plurality of regions;
• and
• adjusting the attitude of at least one of the diffraction grating and the shield grating on the basis of the intensity distributions of the plurality of regions.

An imaging apparatus comprising:

• a diffraction grating which diffracts electromagnetic waves from an electromagnetic wave source;
• a shield grating which shields a part of the electromagnetic waves diffracted by the diffraction grating;
• a detector which detects an intensity distribution of the electromagnetic waves through the shield grating;
• and
• an adjusting unit which adjusts the attitude of at least one of the diffraction grating and the shield grating on the basis of the detection result by the detector,
• wherein the adjusting unit:
• obtains information on the intensity distribution detected by the detector;
• and
• adjusts the inclination of at least one of the diffraction grating and the shield grating about the light axis on the basis of the information on the intensity distributions.

An adjusting method used in an imaging apparatus having a diffraction grating which diffracts electromagnetic waves from an electromagnetic wave source;

• a shield grating which shields a part of the electromagnetic waves diffracted by the diffraction grating;
• and a detector which detects an intensity distribution of the electromagnetic waves through the shield grating, the method comprising the steps of:
• obtaining information on the intensity distribution detected by the detector;
• and
• adjusting the inclination of at least one of the diffraction grating and the shield grating about the light axis on the basis of the intensity distribution data.