Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the composition

An actinic-ray- or radiation-sensitive resin composition comprising a resin (P) containing a repeating unit (A) represented by either of general formula (I) and (II) below that when exposed to actinic rays or radiation, is decomposed to thereby generate an acid and at least two types of repeating units (B1), (B2) that when acted on by an acid, are decomposed to thereby generate an alkali-soluble group, wherein the alkali-soluble group generated by the repeating unit (B1) is different from the alkali-soluble group generated by the repeating unit (B2),

• wherein
• in general formula (I),
• each of R11, R12 and R13 independently represents a hydrogen atom, an alkyl group, a monovalent aliphatic hydrocarbon ring group, a halogen atom, a cyano group or an alkoxycarbonyl group,
• X11 represents a single bond,
• X12 represents —O—, —SO2—, or a group composed of a combination of these,
• X13 represents a single bond, —O—,—S—, —CO—, —SO2—, —NR— (R represents a hydrogen atom or an alkyl group), a bivalent nitrogen-containing nonaromatic heterocyclic group or a group composed of a combination of these,
• L11 represents a single bond, an alkylene group, an alkenylene group, a bivalent aliphatic hydrocarbon ring group, a bivalent aromatic ring group or a group composed of a combination of two or more of these, provided that in the group composed of a combination, two or more groups combined together may be identical to or different from each other and may be linked to each other through, as a connecting group, —O—, —S—, —CO—, —SO2—, —NR— (R represents a hydrogen atom or an alkyl group), a bivalent nitrogen-containing nonaromatic heterocyclic group or a group composed of a combination of these,
• L12 represents an alkylene group, an alkenylene group, a bivalent aliphatic hydrocarbon ring group, a bivalent aromatic ring group or a group composed of a combination of two or more of these, provided that the hydrogen atoms of these groups are partially or entirely substituted with a substituent selected from among a fluorine atom, a fluoroalkyl group, a nitro group and a cyano group, and provided that in the group composed of a combination, two or more groups combined together may be identical to or different from each other and may be linked to each other through, as a connecting group, —O—, —S—, —CO—, —SO2—, —NR— (R represents a hydrogen atom or an alkyl group), a bivalent nitrogen-containing nonaromatic heterocyclic group or a group composed of a combination of these,
• Ar1 represents a bivalent aromatic ring group or a group composed of a combination of a bivalent aromatic ring group and an alkylene group,
• Z1 represents a moiety that when exposed to actinic rays or radiation, is converted to a sulfonic acid group, an imidate group or a methide group,
• in general formula (II),
• each of R21, R22 and R23 independently represents a hydrogen atom, an alkyl group, a monovalent aliphatic hydrocarbon ring group, a halogen atom, a cyano group or an alkoxycarbonyl group,
• X21 represents —O—, —S—, —CO—, —SO2—, —NR— (R represents a hydrogen atom or an alkyl group), a bivalent nitrogen-containing nonaromatic heterocyclic group or a group composed of a combination of these,
• L21 represents an alkylene group, an alkenylene group, a bivalent aliphatic hydrocarbon ring group or a group composed of a combination of two or more of these, provided that in the group composed of a combination, two or more groups combined together may be identical to or different from each other and may be linked to each other through, as a connecting group, —O—, —S—, —CO—, —SO2—, —NR— (R represents a hydrogen atom or an alkyl group), a bivalent nitrogen-containing nonaromatic heterocyclic group, a bivalent aromatic ring group or a group composed of a combination of these,
• each of X22 and X23 independently represents a single bond, —O—, —S—, —CO—, —SO2—, —NR— (R represents a hydrogen atom or an alkyl group), a bivalent nitrogen-containing nonaromatic heterocyclic group or a group composed of a combination of these,
• Ar2 represents a bivalent aromatic ring group or a group composed of a combination of a bivalent aromatic ring group and an alkylene group,
• L22 represents an alkylene group, an alkenylene group, a bivalent aliphatic hydrocarbon ring group, a bivalent aromatic ring group or a group composed of a combination of two or more of these, provided that the hydrogen atoms of these groups are partially or entirely substituted with a substituent selected from among a fluorine atom, a fluoroalkyl group, a nitro group and a cyano group, and provided that in the group composed of a combination, two or more groups combined together may be identical to or different from each other and may be linked to each other through, as a connecting group, —O—, —S—, —CO—, —SO2—, —NR— (R represents a hydrogen atom or an alkyl group), a bivalent nitrogen-containing nonaromatic heterocyclic group or a group composed of a combination of these, and
• Z2 represents a moiety that when exposed to actinic rays or radiation, becomes a sulfonic acid group, an imidate group or a methide group.