Back to results
US 9,005,499 B2Granted
Method for manufacturing retainer ring of chemical mechanical polishing device
AssigneeWill Be S & T Co., Ltd.
InventorsHan-Ju Lee, Min-Gyu Kim, Kwang-Hee Ku, Jae-Bok Lee
Life of this patent
Estimating the term…
Abstract
Disclosed herein is a method of manufacturing a retainer ring for a chemical mechanical polishing device. Insert pins are coupled to an insert ring member. The insert ring member is thereafter disposed in a mold such that a space is defined around the insert ring member in the mold. Subsequently, molten shell material is injected into the mold to form a shell member. Thereby, the retainer ring is manufactured, having a structure such that the insert ring member is completely covered with the shell member.
Claims9
A method for manufacturing a retainer ring of a chemical mechanical polishing device, comprising:
- coupling insert pins into respective pin coupling holes formed in an insert ring member, wherein the pin coupling holes are spaced apart from each other;
- disposing the insert ring member in a mold by coupling the insert pins to an interior of the mold such that a space is defined around the insert ring member in the mold;
- and
- molding a shell member covering the insert ring member by injecting molten shell material into the mold in which the insert ring member is disposed,
- wherein each of the insert pins comprises a spacing protrusion protruding above one surface of the insert ring member, and
- the disposing comprises disposing the insert ring member in the mold by inserting the spacing protrusions of the insert pins into corresponding mounting holes formed in the mold so that the space is defined around the insert ring member.
3 more elements
A method for manufacturing a retainer ring of a chemical mechanical polishing device, comprising:
- coupling insert pins into respective pin coupling holes formed in an insert ring member, wherein the pin coupling holes are spaced apart from each other;
- disposing the insert ring member in a mold by coupling the insert pins to an interior of the mold such that a space is defined around the insert ring member in the mold;
- molding a shell member covering the insert ring member by injecting molten shell material into the mold in which the insert ring member is disposed;
- and
- manufacturing the insert ring member in which the pin coupling holes are formed at positions spaced apart from each other, before the coupling of the insert pins,
- wherein the manufacturing the insert ring member comprises reusing synthetic resin obtained from a scrapped retainer ring of chemical mechanical polishing device.
3 more elements
A method for manufacturing a retainer ring of a chemical mechanical polishing device, comprising:
- coupling insert pins into respective pin coupling holes formed in an insert ring member , wherein the pin coupling holes are spaced apart from each other;
- disposing the insert ring member in a mold by coupling the insert pins to an interior of the mold such that a space is defined around the insert ring member in the mold;
- and
- molding a shell member covering the insert ring member by injecting molten shell material into the mold in which the insert ring member is disposed,
- wherein each of the insert pins comprises:
- a fitting part tightly fitted into the corresponding pin coupling hole of the insert ring member;
- and
- a spacing protrusion protruding from the fitting part upwards so that when the fitting part is tightly fitted into the pin coupling hole, the spacing protrusion protrudes from a surface of the insert ring member, and
- the coupling comprises tightly fitting the fitting parts of the insert pins into the respective pin coupling holes of the insert ring member,
- wherein a seating flange protrudes outwards from a circumferential outer surface of the fitting part, the seating flange being seated onto an upper surface of the insert ring member, and
- the coupling comprises coupling the fitting parts of the insert pins to the respective pin coupling holes such that lower surfaces of the seating flanges of the fitting parts are seated onto the upper surface of the insert ring member,
- wherein a seating guide groove is formed around a circumferential outer surface of a junction between the lower surface of the seating flange and the fitting part, and
- the coupling comprises bringing the lower surface of the seating flange into close contact with the upper surface of the insert ring member so that the spacing protrusion is oriented in a vertical direction.
10 more elements
A method for manufacturing a retainer ring of a chemical mechanical polishing device, comprising:
- coupling insert pins into respective pin coupling holes formed in an insert ring member , wherein the pin coupling holes are spaced apart from each other;
- disposing the insert ring member in a mold by coupling the insert pins to an interior of the mold such that a space is defined around the insert ring member in the mold;
- and
- molding a shell member covering the insert ring member by injecting molten shell material into the mold in which the insert ring member is disposed,
- wherein each of the insert pins comprises:
- a fitting part tightly fitted into the corresponding pin coupling hole of the insert ring member;
- and
- a spacing protrusion protruding from the fitting part upwards so that when the fitting part is tightly fitted into the pin coupling hole, the spacing protrusion protrudes from a surface of the insert ring member, and
- the coupling comprises tightly fitting the fitting parts of the insert pins into the respective pin coupling holes of the insert ring member,
- wherein a pin fastening hole is longitudinally formed through the fitting part, and
- the molding comprises filling the pin fastening hole with the molten shell material such that upper and lower portions of the shell member covering the insert ring member are connected to each other,
- wherein the pin fastening hole is open through a circumferential outer surface of the fitting part.
9 more elements
Dependencies are inferred from the claim text.