Filter and method of the same

A filter made of resin comprising:

• a through-hole film portion;
• and
• a structure reinforce portion, wherein
• a through-hole is provided in the through-hole film portion,
• the thickness of the through-hole film portion is from 0.5 to 2.0 μm,
• the bore of the through-hole is from 0.05 to 0.5 μm,
• the thickness of the structure reinforce portion is bigger than the thickness of the through-hole film portion,
• the structure reinforce portion encloses the through-hole film portion, and
• a damage-reduction structure is provided on an upper surface of the structure reinforce portion, wherein
• the damage-reduction structure is at least one of
• an uneven structure,
• a low surface energy layer with a surface energy that is smaller than a surface energy of the structure reinforce portion, and
• a low elastic modulus layer with an elastic modulus that is smaller than an elastic modulus of the structure reinforce portion, and wherein
• the surface energy of the low surface energy layer is 30 or less mJ/m2, and
• a low elastic modulus layer is provided on the surface of the through-hole film portion.

A filter made of resin comprising:

• a through-hole film portion;
• and
• a structure reinforce portion, wherein
• a through-hole is provided in the through-hole film portion,
• the thickness of the through-hole film portion is from 0.5 to 2.0 μm,
• the bore of the through-hole is from 0.05 to 0.5 μm,
• the thickness of the structure reinforce portion is bigger than the thickness of the through-hole film portion,
• the structure reinforce portion encloses the through-hole film portion, and
• a damage-reduction structure is provided on an upper surface of the structure reinforce portion, wherein
• the damage-reduction structure is at least one of
• an uneven structure,
• a low surface energy layer with a surface energy that is smaller than a surface energy of the structure reinforce portion, and
• a low elastic modulus layer with an elastic modulus that is smaller than an elastic modulus of the structure reinforce portion, wherein
• the filter comprises a protrusion,
• the protrusion is provided on the edge of the through-hole in the through-hole film portion, and wherein
• a height of the protrusion is from 2 to 20 nm.