Fixed abrasive pad and method for forming the same

A method for forming a fixed abrasive pad, comprising:

• providing a substrate;
• successively depositing a plurality of abrasive sub-layers on the substrate;
• and
• patterning the abrasive sub-layers to form a plurality of discrete abrasive blocks,
• wherein the depositing of each abrasive sub-layer is followed by a solidifying step,
• wherein an abrasive density of each of the plurality of abrasive sub-layers increases layer-by-layer from a top abrasive sub-layer, a second abrasive sub-layer, to a bottom abrasive sub-layer by a predetermined ratio between 1.099 and 1.124 which is defined as the ratio of a measured abrasive block surface area of a topmost surface of a sub-layer to a measured abrasive block surface area of a bottommost surface of the same sub-layer
• wherein the patterning is achieved using a mould having a gravure pattern corresponding to a geometric shape of the discrete abrasive blocks;
• and
• wherein, provided that x represents an abrasive density of the top abrasive sub-layer, y represents the predetermined ratio, n (n>2) represents a number of an abrasive sub-layer counting from the top abrasive sub-layer, the abrasive density of each abrasive sub-layer from the second abrasive sub-layer to the bottom abrasive sub-layer is defined by x*y(n−1).