Device for machining a substrate and a method for this purpose
Assigneesolar-semi GmbH
InventorPirmin Muffler
Life of this patent
Estimating the term…
Abstract
In a device for machining, in particular etching and/or developing, substrates, in particular wafers, in particular etching and/or developing, having a turntable, the turntable has a Venturi gap.
Claims4
A device for machining a substrate comprising a turntable having an upper surface adapted to receive a substrate, a bottom part and a Venturi gap defined between the upper surface and the bottom part, the bottom part of the turntable is provided with a duct which receives a pressure medium from a pressure medium source, the upper surface of the turntable is provided with a plurality of through holes communicating with the duct for allowing the pressure medium to escape from the duct, a diffuser is inserted into the bottom part of the turntable and forms the Venturi gap, and the turntable has a chamfer on an upper circumferential edge of the turntable for directing the medium into a region below the turntable.
Dependencies are inferred from the claim text.