Gas backpressure sensor assembly

An exhaust gas recirculation system for an engine comprising:

• an EGR tube configured to receive an exhaust gas from the engine;
• and
• an EGR module having an EGR valve configured to receive the exhaust gas from the EGR tube and an exhaust backpressure sensor assembly;
• wherein the exhaust backpressure sensor assembly includes a housing having a wall defining a cavity with a port open to the EGR tube, a carrier rigidly secured to the wall, an electronic chip secured to and rigidly supported by the carrier on an opposed side from the port and including a diaphragm portion exposed to the port, a cap mounted on the chip on an opposed side from the carrier, and a biasing apparatus mounted on the cap on an opposed side from the chip and configured to bias the cap against the chip in a direction opposite from exhaust gas pressure on the diaphragm.

A gas sensor assembly comprising:

• a housing wall defining a cavity with a port open to a gas;
• a carrier mounted to the wall;
• an electronic chip fixed to the carrier on an opposed side from the port and including a diaphragm portion;
• a cap mounted to the chip opposite the carrier;
• a biaser, located between the cap and the wall, biasing the cap toward the chip and the chip toward the carrier.