Systems and methods for tuning technology files
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMeng-Fan Wu, Ke-Ying Su, Hsien-Hsin Sean Lee
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Abstract
A method generally comprises arranging a plurality of layer combinations into a plurality of groups such that each of the layer combinations is assigned to at least one group. A shifting analysis is performed on a plurality of benchmark circuits for each of the groups. At least one tuning vector value is calculated based, at least in part, on a plurality of criteria vectors of the benchmark circuits. A shift is applied on each of the groups by the tuning vector value and a technology file, such as a 2.5 dimensional RC techfile, is regenerated.
Claims20
A method for tuning a technology file using a computer system that includes a processor, the method comprising:
- generating a plurality of three dimensional patterns that include a plurality of layer combinations of a plurality of layers for an integrated circuit (IC), using the processor;
- arranging the plurality of layer combinations into a plurality of groups such that each of the plurality of layer combinations is assigned to a separate group, using the processor;
- identifying a plurality of benchmark circuits for each of the plurality of groups, using the processor;
- determining whether the accuracy for at least one of the plurality of benchmark circuits is within a predefined criteria, using the processor;
- calculating a shifting impact vector value for each of the plurality of benchmark circuits when the accuracy for at least one of the plurality of benchmark circuits is not within the predefined criteria, using the processor;
- identifying at least one tolerance threshold vector value for each of the plurality of benchmark circuits, using the processor;
- calculating at least one tuning vector value based, at least in part, on the at least one tolerance threshold vector value, using the processor;
- applying a shift on each of the plurality of groups by the at least one tuning vector value;
- and
- regenerating a technology file.
A system comprising:
- a non-transient machine readable storage medium storing at least one technology file generated by an electronic design automation (“EDA”) tool;
- and
- an RC tool within the EDA tool configured to:
- generate a plurality of three dimensional patterns that include a plurality of layer combinations of a plurality of layers for an integrated circuit (IC);
- arrange the plurality of layer combinations into a plurality of groups such that each of the plurality of layer combinations is assigned to a separate group;
- identify a plurality of benchmark circuits for each of the plurality of groups;
- determine whether the accuracy for at least one of the plurality of benchmark circuits is within a predefined criteria;
- calculate a shifting impact vector value for each of the plurality of benchmark circuits when the accuracy for at least one of the plurality of benchmark circuits is not within the predefined criteria;
- identify at least one tolerance threshold vector value for each of the plurality of benchmark circuits;
- calculate at least one tuning vector value based, at least in part, on the at least one tolerance threshold vector value;
- apply a shift on each of the plurality of groups by the at least one tuning vector value;
- and
- regenerate the technology file.
At least one non-transitory computer-readable storage medium having computer-executable instructions embodied thereon, wherein, when executed by at least one processor, the computer-executable instructions cause the at least one processor to:
- generate a plurality of three dimensional patterns that include a plurality of layer combinations of a plurality of layers for an integrated circuit (IC);
- arrange the plurality of layer combinations into a plurality of groups such that each of the plurality of layer combinations is assigned to a separate group;
- identify a plurality of benchmark circuits for each of the plurality of groups;
- determine whether the accuracy for at least one of the plurality of benchmark circuits is within a predefined criteria;
- calculate a shifting impact vector value for each of the plurality of benchmark circuits when the accuracy for at least one of the plurality of benchmark circuits is not within the predefined criteria;
- identify at least one tolerance threshold vector value for each of the plurality of benchmark circuits;
- calculate at least one tuning vector value based, at least in part, on the at least one tolerance threshold vector value;
- apply a shift on each of the plurality of groups by the at least one tuning vector value;
- and
- regenerate a technology file.
Dependencies are inferred from the claim text.