US 9,001,489 B2 · Electrostatic chuck AlN dielectric repair

Abstract

The present invention generally relates to a refurbished electrostatic chuck and a method of refurbishing a used electrostatic chuck. Initially, a predetermined amount of dielectric material is removed from the used electrostatic chuck to leave a base surface. Then, the base surface is roughened to enhance the adherence of new dielectric material thereto. The new dielectric material is then sprayed onto the roughened surface. A mask is then placed over the new dielectric material to aid in the formation of mesas upon which a substrate will sit during processing. A portion of the new dielectric layer is then removed to form new mesas. After removing the mask, edges of the mesas may be smoothed and the refurbished electrostatic chuck is ready to return to service after cleaning.

Claims16

Dependent claims

A method for refurbishing an electrostatic chuck, comprising:

measuring a depth of an electrode below a top surface of an electrostatic chuck body;
determining a thickness of a portion of the electrostatic chuck body to be removed in response to the measured depth;
removing the portion of the electrostatic chuck body to expose a base surface;
roughening the base surface;
plasma spraying dielectric material onto the roughened base surface to form a dielectric layer of sprayed material on the base surface;
compressing the dielectric layer of sprayed material;
and
selectively removing material from the compressed dielectric layer of sprayed material to establish a new upper surface.

5 more elements

Dependencies are inferred from the claim text.

Electrostatic chuck AlN dielectric repair

Life of this patent

Electrostatic chuck AlN dielectric repair

Life of this patent

Abstract

Claims16