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US 9,000,542 B2Granted
Suspended membrane device
AssigneeStmicroelectronics Pte Ltd
InventorsTien Choy Loh, Olivier Le Neel
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Abstract
The present disclosure is directed to a device that includes a substrate and a sensor formed on the substrate. The sensor includes a chamber formed from a plurality of integrated cavities, a membrane above the substrate, the membrane having a plurality of openings, each opening positioned above one of the cavities, and a plurality of diamond shaped anchors positioned between the membrane and the substrate, the anchors positioned between each of the cavities. A center of each opening is also a center of one of the cavities.
Claims20
A device, comprising:
- a substrate;
- a sensor formed on the substrate, the sensor including:
- a single chamber having a plurality of integrated cavities;
- a membrane above the substrate, the membrane having a plurality of openings, each opening positioned above one of the cavities;
- and
- a plurality of anchors positioned between the membrane and the substrate, the anchors positioned between each of the cavities.
3 more elements
A device, comprising:
- a substrate;
- a membrane suspended above the substrate, the membrane having a plurality of openings arranged in rows and columns, a center of one row of openings being spaced from a center of an adjacent row of openings by a distance, and a center of one column of openings being spaced from a center of an adjacent column of openings by the distance;
- and
- a plurality of anchors positioned between the substrate and the membrane, the plurality of anchors arranged in rows and columns, a center of one row of anchors being spaced from a center of an adjacent row of anchors by the distance, and a center of one column of anchors being spaced from a center of an adjacent column of anchors by the distance, the rows and columns of the anchors being shifted with respect to the rows and columns of the openings by half of the distance.
1 more element
A device, comprising:
- a semiconductor substrate;
- a bottom electrode in contact with the semiconductor substrate;
- an array of anchors formed on the substrate;
- a membrane supported by the anchors and spaced apart from the bottom electrode at a fixed distance, the membrane having a plurality of openings therein;
- and
- a top electrode in contact with the membrane.
3 more elements
Dependencies are inferred from the claim text.