Methods to prevent filler entrapment in microelectronic device to microelectronic substrate interconnection structures

A method, comprising:

• providing a microelectronic device having an active surface and an opposing back surface with at least one interconnection structure extending from the microelectronic device active surface;
• disposing an underfill material over the microelectronic device active surface and the at least one microelectronic device interconnection structure which forms an outer surface opposing the microelectronic device active surface, wherein the underfill material includes filler particles dispersed within a carrier material;
• repelling the filler particles within the carrier material from between the at least one microelectronic device interconnection structure and the underfill material outer surface;
• and
• attaching the at least one microelectronic device interconnection structure to a respective bond land on a microelectronic substrate after repelling the filler particles within the carrier material from between the at least one microelectronic device interconnection structure and the underfill material outer surface.