Apparatus and method for collecting powder generated during film deposition process
AssigneeMacronix International Co., Ltd.
InventorsXianping Meng, Bingfu Chen, Licheng Hu
Life of this patent
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Abstract
An apparatus for controlling a flow of gas comprises a spiral path guiding member. The spiral path guiding member comprises at least two groups of guiding plates. Each guiding plate of each group is disposed in an axial direction to form a longitudinal axis. Each group is spaced apart in the longitudinal direction. A surface of each guiding plate is substantially parallel to the longitudinal axis. At least one guiding plate of each group has a guiding plate opening. Guiding plate openings of the guiding plates may facilitate gas to flow in a spiral flow path.
Claims20
An apparatus for controlling a flow of gas, comprising:
- a spiral path guiding member comprising at least two groups of guiding plates, each guiding plate of each group disposed in an axial direction from a longitudinal axis, each group spaced apart in the longitudinal direction, a surface of each guiding plate being substantially parallel to the longitudinal axis, at least one guiding plate of each group having a guiding plate opening, wherein guiding plate openings of the guiding plates facilitate gas to flow in a spiral flow path.
A method of controlling a flow of gas, comprising:
- diverting a flow of gas in a spiral flow path defined by a spiral path guiding member comprising at least two groups of guiding plates, each guiding plate of each group disposed in an axial direction from a longitudinal axis, each group spaced apart in the longitudinal direction, a surface of each guiding plate being substantially parallel to the longitudinal axis, at least one guiding plate of each group having a guiding plate opening, wherein guiding plate openings of the guiding plates define a portion of the spiral flow path.
An apparatus for controlling a gas flow, the apparatus comprising:
- a post having a longitudinal axis;
- a cooling member comprising two or more parallel cooling plates connected to the post and spaced apart in a longitudinal direction, a surface of each cooling plate being substantially perpendicular to the longitudinal axis of the post, each cooling plate comprising at least one cooling plate opening, two adjacent cooling plates configured to define a space;
- and
- a spiral path guiding member comprising at least two groups of guiding plates, each guiding plate of each group connected to the post in an axial direction, each group placed in the space defined by two adjacent cooling plates, a surface of each guiding plate being substantially parallel to the longitudinal axis of the post, at least one guiding plate of each group having a guiding plate opening, at least one guiding plate being shorter than other guiding plates in the group to form a space above the shorter guiding plate, wherein the guiding plate opening and the space above the shorter guiding plate facilitate gas to flow in a spiral flow path.
Dependencies are inferred from the claim text.