Method and apparatus for liquid treatment of wafer shaped articles
AssigneeLam Research Corporation
InventorMichael Puggl
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Abstract
An apparatus for treating a wafer-shaped article, comprises a spin chuck for holding a wafer-shaped article in a predetermined orientation, at least one upper nozzle for dispensing a treatment fluid onto an upwardly facing surface of a wafer-shaped article when positioned on the spin chuck, and at least one lower nozzle arm comprising a series of lower nozzles extending from a central region of the spin chuck to a peripheral region of the spin chuck. The series of nozzles comprises a smaller nozzle in a central region of the spin chuck and a larger nozzle in a peripheral region of the spin chuck. In the method according to the invention, a heated liquid is supplied through the series of nozzles so as to supply more heat to peripheral regions of a wafer than to central regions.
Claims15
Apparatus for treating a wafer-shaped article, comprising:
- a spin chuck for holding a wafer-shaped article in a predetermined orientation wherein a lower surface of the wafer-shaped article is spaced a predetermined distance from an upper surface of the spin chuck;
- at least one upper nozzle for dispensing a treatment fluid onto an upwardly facing surface of a wafer-shaped article when positioned on the spin chuck;
- and
- at least one lower nozzle arm comprising a series of lower nozzles extending from a central region of the spin chuck to a peripheral region of the spin chuck, the series of nozzles being directed upwardly toward the lower surface of a wafer-shaped article when positioned on the spin chuck, and the series of nozzles comprising a nozzle having a smaller discharge opening in a central region of the spin chuck and a nozzle having a larger discharge opening in a peripheral region of the spin chuck;
- wherein the at least one lower nozzle arm is mounted to the spin chuck so as to remain stationary during rotation of said spin chuck and so as to be non-displaceable axially of the spin chuck.
Dependencies are inferred from the claim text.