Hybrid design rule for double patterning
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsCheng-I Huang, Wen-Hao Chen, Wen-Chun Huang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsCheng-I Huang, Wen-Hao Chen, Wen-Chun Huang
Estimating the term…
Among other things, one or more systems and techniques for generating or implementing a hybrid design rule set are provide herein. A set of color design rules and a set of color agnostic design rules are generated and exposed for selective design rule assignment. In an embodiment, a first color design rule is assigned to a first polygon. In an embodiment, a first color agnostic design rule is assigned to a second polygon. In this way, color design rules and color agnostic design rules are selectively applied to polygons of a design layout. Color design rules are selected for space and design efficiency. Color agnostic rules are selected for conservative design layout for design ease. A design rule checking stage and a design rule fixing stage are performed such that the design layout is compliant after color decomposition without a second design rule fixing stage.
A system for hybrid design rule generation, comprising:
A method for hybrid design rule generation, comprising:
A method for implementing a hybrid design rule set, comprising:
Dependencies are inferred from the claim text.