Positioning device, lithographic apparatus, positioning method and device manufacturing method

A positioning device for positioning an object within a lithographic apparatus, the positioning device comprising:

• a support structure configured to support the object;
• at least two short-stroke units, each having a connection section connected to the support structure at a respective connection point;
• and
• a long-stroke unit;
• wherein each of the short-stroke units comprises a short-stroke actuator system configured to cooperate with a same surface of the long-stroke unit to provide independently an actuation force between the connection section of the short-stroke unit and the long-stroke unit so that a position of a first of the at least two short-stroke units is independently controlled relative to a position of a second of the at least two short-stroke units;
• and
• wherein the long-stroke unit comprises a long-stroke actuator system configured to provide an actuation force between the long-stroke unit and a reference structure of the lithographic apparatus.