Apparatus for supporting an optical element, and method of making same
AssigneeASML Holding N.V.
InventorsWindy Lynn Farnsworth, Sohrab Simani
Life of this patent
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Abstract
An apparatus for supporting an optical element is provided. The apparatus includes a lens cell (1003) and a plurality of fingers (1000) coupled to the lens cell. Each finger includes a base (1012) configured to be coupled to the optical element when mounted therein, first (1006a) and second (1006b) flexures coupled at first respective ends to and extending from the base (1012) at a divergence angle between about 75 and 165 degrees, and a mounting member (1008) configured to couple together second respective ends of the first and second flexures. The mounting member thereby couples the base (1012) to the lens cell (1003).
Claims20
An apparatus for supporting an optical element, comprising:
- a lens cell having an interior surface, wherein the interior surface circumscribes an interior region of the lens cell;
- and
- a plurality of fingers attached to the lens cell, wherein each of the plurality of fingers includes:
- a base configured to directly contact the optical element.
- first and second flexures coupled at first respective ends to the base and extending from the base at a divergence angle between about 75 and 165 degrees, wherein the base extends from an outer surface of the first and second flexures into the interior region of the lens cell, and
- a mounting member that attaches a second end of the first flexure to a second end of the second flexure and attaches the base to the lens cell,
- wherein each mounting member is separated from all other mounting members of the plurality of fingers.
A method of forming an apparatus for supporting an optical element, comprising:
- forming a lens cell having an interior surface, wherein the interior surface circumscribes an interior region of the lens cell;
- forming a plurality of fingers, comprising:
- forming a base configured to directly contact the optical element,
- forming first and second flexures coupled at first respective ends to the base and extending from the base at a divergence angle between about 75 and 165 degrees, wherein the base extends from an outer surface of the first and second flexures into the interior region of the lens cell, and
- forming a mounting member that attaches a second end of the first flexure to a second end of the second flexure;
- and
- attaching each of the mounting members of each finger of the plurality of fingers to the lens cell,
- wherein each mounting member is separated from all other mounting members of the plurality of fingers.
A lithographic apparatus for projecting an image onto a substrate, the lithographic apparatus comprising:
- an optical system, the optical system including:
- a lens cell having an interior surface, wherein the interior surface circumscribes an interior region of the lens cell;
- and
- a plurality of fingers attached to the lens cell, wherein each of the plurality of fingers includes:
- a base configured to directly contact an optical element,
- first and second flexures coupled at first respective ends to the base and extending from the base at a divergence angle between about 75 and 165 degrees, wherein the base extends from an outer surface of the first and second flexures into the interior region of the lens cell, and
- a mounting member that attaches together second respective ends of the first and second flexures and attaches the base to the lens cell,
- wherein each mounting member is separated from all other mounting members of the plurality of fingers.
Dependencies are inferred from the claim text.