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US 8,946,085 B2Granted
Semiconductor process and structure
AssigneeIneffable Cellular Limited Liability Company
InventorWen-Hsiung Chang
Life of this patent
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Abstract
A semiconductor process includes the following steps. Firstly, a conductive substrate is provided. Then, at least one insulating pattern is formed on the conductive substrate. Thereafter at least one metal pattern is formed on the insulating pattern. After that, a passivation layer is formed on the conductive substrate to cover the metal pattern by an electroplating process.
Claims13
A method of processing a semiconductor, the method comprising:
- forming a conductive substrate having at least one through hole from a back surface of the conductive substrate to an active surface of the conductive substrate;
- forming at least one bonding pad on the active surface of the conductive substrate;
- forming an insulating pattern on the conductive substrate, wherein the insulating pattern is formed on side walls of the at least one through hole;
- forming a metal pattern on the insulating pattern;
- and
- performing a first electroplating process to form a passivation layer covering the metal pattern, wherein the passivation layer includes an insulative material.
3 more elements
A method of processing a semiconductor, the method comprising:
- providing a conductive substrate having at least one through hole from a back surface of the conductive substrate to an active surface of the conductive substrate;
- providing at least one bonding pad on the active surface of the conductive substrate;
- providing an insulating pattern on the conductive substrate;
- providing a metal pattern on the insulating pattern, wherein the insulating pattern is on the conductive substrate and on side walls of the at least one through hole;
- and
- employing the conductive substrate as an electrode to perform an electroplating process to form a passivation layer on the conductive substrate, wherein the passivation layer covers the metal pattern, and wherein the passivation layer includes an insulating material.
3 more elements
Dependencies are inferred from the claim text.