Organic light emitting diode display, thin film transitor array panel, and method of manufacturing the same

A method of manufacturing a TFT array panel, the method comprising:

• stacking a polysilicon layer, an insulating layer, and a metal layer on a substrate;
• forming a photosensitive film pattern having a first portion and a second portion having a thickness smaller than that of the first portion on the metal layer;
• forming a metal pattern, a gate insulating layer, and a semiconductor by etching the metal layer, the insulating layer, and the polysilicon layer using the photosensitive film pattern as a mask;
• forming a gate electrode by removing the second portion of the photosensitive film pattern and by etching the metal pattern using the first portion of the photosensitive film pattern as a mask;
• removing the first portion of the photosensitive film pattern;
• forming an interlayer insulating layer on the gate electrode;
• forming contact holes that expose the semiconductor in the interlayer insulating layer;
• and forming a source electrode and a drain electrode that are connected to the source area and the drain area, respectively, on the interlayer insulating layer, wherein before or after the removing of the first portion, the method further includes doping conductive impurities in the semiconductor.