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US 8,943,611 B2Granted
Probe module, method for making and use of same
AssigneeNational Institute of Standards and Technology
InventorsRachel Cannara, Christian Long
Life of this patent
Estimating the term…
Abstract
A probe module includes a mount; a cantilever disposed on the mount; an electrode disposed on the mount and opposing the cantilever, and a primary fastener disposed on the mount to mechanically separate the cantilever and the electrode at a primary distance. In the probe module, the cantilever is detachably disposed on the mount, the electrode is detachably disposed on the mount, or a combination thereof.
Claims20
A probe module comprising:
- a mount;
- a cantilever disposed on the mount;
- an electrode disposed on the mount and opposing the cantilever;
- and
- a primary fastener disposed on the mount to mechanically separate the cantilever and the electrode at a primary distance,
- wherein the cantilever is detachably disposed on the mount, or the electrode is detachably disposed on the mount.
3 more elements
Dependencies are inferred from the claim text.