Heated electrostatic chuck including mechanical clamp capability at high temperature

A method for clamping a workpiece to an electrostatic clamp, the method comprising:

• selectively providing a clamping voltage to the electrostatic clamp, therein selectively electrostatically clamping the workpiece to a clamping surface thereof;
• determining whether one or more predetermined conditions are met concurrent with exposing the workpiece to a process medium, wherein the one or more predetermined conditions are selected from a group consisting of a measured temperature of the workpiece and/or electrostatic clamp that meets or exceeds a predetermined temperature, a measured current associated with the electrostatic clamp that meets or exceeds a predetermined leakage current, a measured translational force applied to the electrostatic clamp that meets or exceeds a predetermined electrostatic force, and a measured angular position of the electrostatic clamp that meets or exceeds a predetermined angle;
• determining whether a size of the workpiece is a first size or a second size;
• and
• applying a mechanical clamping force to the workpiece only when the one or more predetermined conditions are met and not applying the mechanical clamping force when the one or more predetermined conditions are not met, therein selectively mechanically clamping the workpiece to the clamping surface, wherein applying the mechanical clamping force to the workpiece comprises mechanically clamping the workpiece to the clamping surface with a first set of mechanical clamping members when the workpiece is the first size, and mechanically clamping the workpiece to the clamping surface with a second set of mechanical clamping members when the workpiece is the second size, and wherein the second size is larger than the first size, wherein only one of the first set of mechanical clamping members or second set of mechanical clamping members mechanically clamps the workpiece of the respective first size or second size to the clamping surface at a time.