Electromechanical microsystems with air gaps

An electromechanical microsystem comprising:

• a base comprising a substrate and a substrate electrode fixed to the substrate,
• a mobile beam suspended above the substrate,
• a voltage generator, connected by a first terminal to the beam, and by a second terminal to the substrate electrode, adapted to generate a difference in potential between the beam and the substrate electrode, and
• at least one mechanical stop connected to the beam and adapted to come into contact with the base during application of a difference in potential between the beam and the substrate electrode defining an air-filled cavity between the beam and the substrate electrode,
• wherein said electromechanical microsystem also comprises an element for blocking electrical charges arranged on the substrate, opposite the at least one mechanical stop, and connected electrically to the beam,
• wherein said element for blocking electrical charges is constituted by a layer of resistive material having an electrical resistivity between 100 MOhms·square and 10 kOhms·square.