Gas flow guiding device for use in crystal-growing furnace
AssigneeNational Central University
InventorsJyh-Chen Chen, Ying-Yang Teng, Chung-Wei Lu, Hsueh-I Chen
Life of this patent
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Abstract
The present invention relates to a gas flow guiding device for use in a crystal-growing furnace. The gas flow guiding device has an insulation layer enclosing a crucible, a gas inlet mounted in the upper insulation layer, and a gas exit formed in the lateral insulation layer. A plurality of guide plates are radially arranged around the opening of the gas inlet, so that the free surface of the melt is blown by the guided gas flow in such a manner that the gas flow takes the impurity away from the free surface efficiently. As a result, the crystal ingot obtained by solidifying the melt will exhibit a reduced concentration of impurities and an improved crystal quality.
Claims9
A gas flow guiding device for use in a crystal-growing furnace, comprising:
- a crucible configured to contain a melt;
- an insulation layer enclosing the crucible and formed with a gas exit;
- a gas inlet mounted in the insulation layer and having an opening;
- and coupled with a height-adjusting the gas inlet in terms of a height relative to a crucible;
- and
- a plurality of guide plates radially arranged around the opening of the gas inlet and configured to guide a gas over the melt and with an angle-adjusting unit for adjusting the guide plates in terms of their angles relative to the gas inlet.
Dependencies are inferred from the claim text.