Methods and systems for control of a surface modification process
OwnerGeorge Atanasoffinventor
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Abstract
A method and system for modifying a substrate, such a thin film, solar panel or the like detects error and/or variance and, if needed, re-optimizes the product design and/or process parameters on the fly, so that product can meet the product specification. This allows for methods and systems of process control that can adaptively change the product design in real time.
Claims44
A computer-assisted method of making a product having a predetermined product specification and an initial product design which defines at least a partial structure of the product, the method comprising:
- (a) modifying a surface of a substrate to form an intermediate product;
- (b) measuring in real time, at least one measured parameter of said intermediate product;
- (c) comparing in real time, said at least one measured parameter with at least one target parameter;
- (d) in response to the result of the comparing step, employing a revised product design that is in accordance with the product specification;
- (e) continuing manufacture of the product based on the revised product design;
- and
- (f) repeating steps (a)-(e) until said predetermined product specification is reached;
- wherein steps (b)-(d) transpire as said surface continues to be modified and the product's product design is revised during the course of manufacture.
A processing system configured to make a product having a predetermined product specification and an initial product design which defines at least a partial structure of the product, the processing system comprising:
- (a) at least one processing apparatus configured to accommodate a substrate having a surface to be modified in order to form an intermediate product;
- (b) at least one detector for measuring, in real time, at least one measured parameter of said intermediate product;
- and
- (c) one or more computers programmed to:
- (c1) compare, in real time, said at least one measured parameter with at least one target parameter derived from the initial product design;
- (c2) create a revised product design that is in accordance with the product specification, based at least in part on the result of comparing the at least one measured parameter with the at least one target parameter derived from the initial product design;
- (c3) store information reflective of the revised product design;
- and
- (c4) control the processing chamber so that it continues manufacture the product based on the revised product design,
- while a surface of said intermediate product continues to be modified;
- and
- wherein the product's product design is revised during the course of manufacture.
Dependencies are inferred from the claim text.