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US 8,914,766 B2Granted
Dose-data generating apparatus
AssigneeKabushiki Kaisha Toshiba
InventorsYosuke Okamoto, Takashi Koike
Life of this patent
Estimating the term…
Abstract
According to one embodiment, generating virtual data by mirroring data based on a dimension measurement result in a measurement region on an inner side of a shot region to a non-shot region on an outer side of a shot edge, and calculating dose data of the measurement region and a non-measurement region based on data in the measurement region and the virtual data are included.
Claims8
A dose-data generating apparatus comprising:
- a processor;
- and
- a non-transitory computer-readable storage medium storing a program that, when executed, causes the processor to:
- generate virtual measurement data by mirroring dimension measurement data in a measurement region on an, inner side of a shot region at a time of exposure to a non-shot region on an outer side of a shot edge of the shot region,
- calculate dose data of the measurement region and a non-measurement region of the dimension measurement data connectedly based on the dimension measurement data and the virtual measurement data, and
- cut the shot region out of the measurement region and the non-measurement region for which the dose data is calculated.
3 more elements
A dose-data generating apparatus comprising:
- a processor;
- and
- a non-transitory computer-readable storage medium storing a program that, when executed, causes the processor to:
- generate virtual dose data by calculating dose data of a measurement region of dimension measurement data on an inner side of a shot region at a time of exposure, based on the dimension measurement data and mirroring the dose data to a non-shot region on an outer side of a shot edge of the shot region,
- calculate dose data of the measurement region and a non-measurement region of the dimension measurement data connectedly based on the dose data of the measurement region and the virtual dose data of the non-shot region, and
- cut the shot region out of the measurement region and the non-measurement region for which the dose data is calculated.
3 more elements
Dependencies are inferred from the claim text.