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US 8,912,697 B2Granted
Vacuum actuator including a stator forming a part of a vacuum partition wall
AssigneeCanon Anelva Corporation
InventorsKazuhito Watanabe, Yukihito Tashiro, Naoyuki Nozawa, Daisuke Kobinata, Hideo Mano
Life of this patent
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Abstract
A vacuum actuator includes a vacuum partition wall, the interior of which can be evacuated to a vacuum, a rotor supported by the vacuum partition wall to be free to rotate, a permanent magnet provided on the outer peripheral surface of the rotor, a coil opposed to the permanent magnet, and a stator provided with the coil. The stator and the vacuum partition wall are formed integrally with each other.
Claims12
A vacuum actuator comprising:
- a vacuum partition wall, an interior of which can be evacuated to a vacuum atmosphere;
- a rotor provided inside said vacuum partition wall to be free to rotate;
- a permanent magnet provided on an outer peripheral surface of said rotor;
- a stator which forms a part of said vacuum partition wall, wherein an inner peripheral surface of said stator is exposed to the vacuum atmosphere, and an outer peripheral surface of said stator is exposed to an atmospheric environment;
- and
- a coil provided with the outer peripheral surface of said stator and exposed to the atmospheric environment,
- wherein said rotor is supported by said vacuum partition wall via a bearing provided in a gap between said rotor and said stator, and
- said bearing has an outer peripheral surface which abuts against an inner peripheral surface of said stator, and an inner peripheral surface which abuts against an outer peripheral surface of said rotor and is configured not to contact with said permanent magnet provided on the outer peripheral surface of said rotor, and
- said permanent magnet is provided in a space surrounded by the outer peripheral surface of said rotor and the inner peripheral surface of said stator and said bearing.
6 more elements
Dependencies are inferred from the claim text.