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US 8,912,620 B2Granted
Getter structure with optimized pumping capacity
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsChristine Ferrandon, Xavier Baillin
Life of this patent
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Abstract
Getter structure comprising at least one getter portion arranged on a support and including at least two adjacent getter material parts arranged on the support one beside the other, with different thicknesses and of which the surface grain densities are different from one another.
Claims12
A getter structure comprising:
- at least one getter portion arranged on a support and including
- at least two adjacent getter material parts arranged on the support one beside the other and having a common surface disposed on the support, with different thicknesses and of which the surface grain densities are different from one another, the thicknesses measured from the common surface and in a direction normal to the common surface.
Dependencies are inferred from the claim text.