Photo-imageable hardmask with positive tone for microphotolithography

Compositions of photo-imageable hardmask with positive tone, said compositions comprising of:

• polymeric resin, said resin is prepared from monomers with molecular structures of
• wherein R is selected from groups consisting of hydrogen and C1-C4 alkyls, and R1 is selected from groups consisting of alkyl, aryl, alkene, alicyclic, epoxy-alkyl, and epoxy-cycloalkyl, and polymerization taking place to said monomers with presence of catalysts in organic solvents under temperatures from 80° C. to 110° C., and volatile alkanols being formed and removed, and polysiloxanes and polysilsesquioxanes being formed with molecular structures of
• wherein R is selected from groups consisting of hydrogen and C1-C4 alkyls, and R1 is selected from groups consisting of alkyl, aryl, alkene, alicyclic groups, epoxy-alkyl, and epoxy-cycloalkyl, and
• a catalyst, said catalyst being selected from a group of chemical compounds able to accelerate condensation reactions to said resin, and said chemical compounds comprising quaternary ammonium salts or amines, and said catalyst being readily deactivated by photo-generated acids, and said compositions comprising of 0.005% to 0.2% of said catalyst by weight, and
• a photoacid generator, said photoacid generator comprising onium salts, and molar ratio of said photoacid generator to said catalyst being 0.5 to 1.5, and
• a film-modifier, said film-modifier comprising polyols or silanols, said polyols comprising 1,1,1-tris(hydroxymethyDethane or pentaerythritol, and said silanols comprising diphenylsilanediol, and
• a quencher, said quencher is selected from alkaline compounds, said alkaline compounds being capable of neutralizing photo-generated acid, and said alkaline compounds comprising n-boc-piperidine, t-butyl 4-hydroxy-1-piperidinecarboxylate, triethanol amine, 1-piperidineethanol, or benzyltriethylammonium chloride, and molar ratio of said quencher to said photoacid generator is 0.2-10, and
• a solvent or mixture of solvents, said solvents comprising propylene glycol methyl ether, propylene glycol methyl ether acetate or ethyl lactate.