Substrate storage container
AssigneeMiraial Co., Ltd.
InventorTsuyoshi Nagashima
Life of this patent
Estimating the term…
Abstract
The position of a substrate temporal placement piece (4) is set so that the substrate temporal placement piece (4) does not overlap a disc-shaped substrate (W) from a viewing direction perpendicular to the surface of the disc-shaped substrate (W), when a lid (20) is attached to a substrate transfer opening (2) of a container main body (1) and the disc-shaped substrate (W) is pressed to a location where the substrate is positioned and held by a back side holding portion (3). Thereby, even if the disc-shaped substrate (W) stored in the container main body (1) is bent due to vibration, impact, etc., there is no danger that the substrate (W) is in contact with the substrate temporal placement piece (4), and the disc-shaped substrate (W) having a larger diameter can be safely stored.
Claims9
A substrate storage container comprising:
- a container main body for storing a plurality of disc-shaped substrates in a parallel manner;
- a substrate transfer opening that is formed in the container main body for transferring the disc-shaped substrate relative to the container main body;
- a lid body that is attached in a detachable manner from outside to the substrate transfer opening in order to seal the substrate transfer opening;
- a back side holding portion that positions and holds an outer edge portion of each of the disc-shaped substrates in a back side area inside of the container main body as seen from the substrate transfer opening;
- a lid side retainer that is provided at an inner wall portion of the lid body and that positions and holds each of the disc-shaped substrates by pushing to a side of the back side holding portion;
- and
- a substrate temporal placement piece for placing the disc-shaped substrate at an area proximal to the substrate transfer opening when the lid body is not attached to the substrate transfer opening,
- wherein the substrate storage container further comprises:
- a substrate placement portion for placing a vicinity of the outer edge portion of the disc-shaped substrate in a back side area inside of the container main body as seen from the substrate transfer opening, when the disc-shaped substrate is not being pushed by the lid side retainer;
- and
- a substrate return means for returning the disc-shaped substrate to a position not held or positioned by the back side holding portion, when the disc-shaped substrate that is being pushed by the lid side retainer enters a state not being pushed by way of the lid side retainer;
- and
- wherein a position of the substrate temporal placement piece is established such that:
- the substrate temporal placement piece overlaps with the disc-shaped substrate as seen in a vertical direction with respect to a face of the disc-shaped substrate, when the lid body is removed from the substrate transfer opening and the disc-shaped substrate is not held or positioned by the back side holding portion;
- and
- the substrate temporal placement piece does not overlap with the disc-shaped substrate as seen in a vertical direction with respect to a face of the disc-shaped substrate, when the lid body is attached to the substrate transfer opening and the disc-shaped substrate is pushed to a position being positioned and held by the back side holding portion.
Dependencies are inferred from the claim text.